Inventor · disambiguated record
Hideki Koitabashi
Also filed as: KOITABASHI HIDEKI
4 granted patents·534 citations·filing 1994–1998
82Inventor score
Technology areasG03F
Files withNIKON CORP4
Top patents by PatentIndex Score
4 records- 0197US5500736AMethod of detecting positionsNIKON CORP·Filed 1994·Granted Mar 19, 1996·473 cites·2 claims
- 0265US5849441AAlignment method utilizing plurality of marks, discriminable from each other, capable of effecting alignment individuallyNIKON CORP·Filed 1997·Granted Dec 15, 1998·20 cites·7 claims
- 0365US5640243APosition detection methodNIKON CORP·Filed 1995·Granted Jun 17, 1997·25 cites·6 claims
- 0459US6141082AAlignment method, exposure method, and exposure apparatusNIKON CORP·Filed 1998·Granted Oct 31, 2000·16 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →