Inventor · disambiguated record
Hikaru Koyama
Also filed as: KOYAMA HIKARU
11 granted patents·4 pending applications·67 citations·filing 2004–2022
87Inventor score
Top patents by PatentIndex Score
15 records- 0188US7019294B2Inspection method and apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2004·Granted Mar 28, 2006·32 cites·15 claims
- 0284US11170332B2Data analysis system and apparatus for analyzing manufacturing defects based on key performance indicatorsHITACHI LTD·Filed 2018·Granted Nov 9, 2021·3 cites·14 claims
- 0384US7655906B2Method and apparatus for scanning and measurement by electron beamHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 2, 2010·13 cites·18 claims
- 0479US7276693B2Inspection method and apparatus using charged particle beamHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 2, 2007·8 cites·19 claims
- 0578US7547884B2Pattern defect inspection method and apparatus thereofHITACHI HIGH TECH CORP·Filed 2006·Granted Jun 16, 2009·4 cites·23 claims
- 0675US10840060B2Scanning electron microscope and sample observation methodHITACHI HIGH TECH CORP·Filed 2018·Granted Nov 17, 2020·1 cites·16 claims
- 0775US7501625B2Electron microscope application apparatus and sample inspection methodHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 10, 2009·3 cites·14 claims
- 0871US9991092B2Scanning electron microscope and sample observation methodCHENG ZHAOHUI·Filed 2010·Granted Jun 5, 2018·3 cites·37 claims
- 0959US2020328101A1Search apparatus and search methodHITACHI LTD·Filed 2020·Application pending·0 cites
- 1058US2025078166A1Insurance claim payment reviewing system, program, and insurance claim payment reviewing methodHITACHI LTD·Filed 2022·Application pending·0 cites
- 1152US10734261B2Search apparatus and search methodHITACHI LTD·Filed 2017·Granted Aug 4, 2020·0 cites·14 claims
- 1252US7652248B2Inspection apparatus and inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Jan 26, 2010·0 cites·5 claims
- 1351US2024280635A1Acoustic circuit breaker diagnosis device and methodHITACHI LTD·Filed 2022·Application pending·0 cites
- 1449US11276551B2Inspection deviceHITACHI LTD·Filed 2020·Granted Mar 15, 2022·0 cites·15 claims
- 1533US2015371825A1Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →