Inventor · disambiguated record
Hidehiko Kozawa
Also filed as: KOZAWA HIDEHIKO
2 granted patents·84 citations·filing 1992–1997
67Inventor score
Technology areasG03F
Files withMITSUBISHI ELECTRIC CORP2
Top patents by PatentIndex Score
2 records- 0178US5296917AMethod of monitoring accuracy with which patterns are writtenMITSUBISHI ELECTRIC CORP·Filed 1992·Granted Mar 22, 1994·52 cites·3 claims
- 0271US6048647APhase shift mask of attenuation type and manufacturing method thereofMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Apr 11, 2000·32 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →