Inventor · disambiguated record
Hideo Namatsu
Also filed as: NAMATSU HIDEO
13 granted patents·1 pending application·310 citations·filing 1985–2011
93Inventor score
Top patents by PatentIndex Score
14 records- 0192US6576066B1Supercritical drying method and supercritical drying apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 2000·Granted Jun 10, 2003·67 cites·24 claims
- 0287US6358673B1Pattern formation method and apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 1999·Granted Mar 19, 2002·76 cites·13 claims
- 0386US6554507B2Pattern formation method and apparatusNIPPON TELEGRAPH & TELEPHONE·Filed 2001·Granted Apr 29, 2003·32 cites·8 claims
- 0480US8465596B2Supercritical processing apparatus and supercritical processing methodTOSHIMA TAKAYUKI·Filed 2011·Granted Jun 18, 2013·5 cites·9 claims
- 0576US8143203B2Method for washing device substrateOKAMOTO HIDEKAZU·Filed 2008·Granted Mar 27, 2012·4 cites·17 claims
- 0674US7977036B2Resist pattern forming methodNIPPON TELEGRAPH & TELEPHONE·Filed 2006·Granted Jul 12, 2011·4 cites·10 claims
- 0773US8026047B2Resist pattern forming method, supercritical processing solution for lithography process, and antireflection film forming methodNIPPON TELEGRAPH & TELEPHONE·Filed 2006·Granted Sep 27, 2011·3 cites·8 claims
- 0872US8568534B2Method for washing device substrateOKAMOTO HIDEKAZU·Filed 2011·Granted Oct 29, 2013·2 cites·20 claims
- 0970US4615782AIntermediate layer material of three-layer resist system and method of forming resist patternNIPPON TELEGRAPH & TELEPHONE·Filed 1985·Granted Oct 7, 1986·32 cites·13 claims
- 1069US5376590ASemiconductor device and method of fabricating the sameNIPPON TELEGRAPH & TELEPHONE·Filed 1993·Granted Dec 27, 1994·35 cites·11 claims
- 1163US4738916AIntermediate layer material of three-layer resist systemNIPPON TELEGRAPH & TELEPHONE·Filed 1986·Granted Apr 19, 1988·25 cites·11 claims
- 1250US5512513AMethod of fabricating semiconductor device with water protective filmNIPPON TELEGRAPH & TELEPHONE·Filed 1994·Granted Apr 30, 1996·15 cites·15 claims
- 1347US5811872ASemiconductor device and method of farbricating the sameNIPPON TELEGRAPH & TELEPHONE·Filed 1996·Granted Sep 22, 1998·10 cites·7 claims
- 1438US2011067733A1Method for cleaning with fluorine compoundASAHI GLASS CO LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →