Inventor · disambiguated record
Hirohisa Ota
Also filed as: OTA HIROHISA
17 granted patents·2 pending applications·139 citations·filing 1995–2021
93Inventor score
Top patents by PatentIndex Score
19 records- 0194US7180575B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Feb 20, 2007·20 cites·9 claims
- 0291US7815424B2Imprinting machine and device manufacturing methodCANON KK·Filed 2005·Granted Oct 19, 2010·20 cites·5 claims
- 0391US7381272B2Processing apparatusCANON KK·Filed 2005·Granted Jun 3, 2008·14 cites·10 claims
- 0490US8834144B2Imprinting machine and device manufacturing methodNAKAMURA TAKASHI·Filed 2010·Granted Sep 16, 2014·9 cites·13 claims
- 0586US10965201B2Transport system, processing system and manufacturing method of articleCANON KK·Filed 2018·Granted Mar 30, 2021·7 cites·14 claims
- 0686US7807065B2Processing methodCANON KK·Filed 2006·Granted Oct 5, 2010·8 cites·2 claims
- 0786US7789647B2Processing apparatus and methodCANON KK·Filed 2005·Granted Sep 7, 2010·9 cites·8 claims
- 0884US7815425B2Processing apparatusCANON KK·Filed 2005·Granted Oct 19, 2010·8 cites·2 claims
- 0979US7690912B2Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the sameCANON KK·Filed 2006·Granted Apr 6, 2010·5 cites·15 claims
- 1078US7846346B1Processing apparatus and methodCANON KK·Filed 2006·Granted Dec 7, 2010·4 cites·11 claims
- 1178US7233383B2Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deteriorationCANON KK·Filed 2005·Granted Jun 19, 2007·5 cites·6 claims
- 1277US7196321B2Fine pattern forming apparatus and fine pattern inspecting apparatusCANON KK·Filed 2005·Granted Mar 27, 2007·6 cites·17 claims
- 1374US8616874B2Pattern transferring apparatus and pattern transferring methodKASUMI KAZUYUKI·Filed 2006·Granted Dec 31, 2013·4 cites·6 claims
- 1470US11929655B2Transport system and processing systemCANON KK·Filed 2021·Granted Mar 12, 2024·0 cites·14 claims
- 1568US7236231B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2005·Granted Jun 26, 2007·2 cites·16 claims
- 1663US5614787AMetal halide lamp having heat dam portionHAMAMATSU PHOTONICS KK·Filed 1995·Granted Mar 25, 1997·18 cites·31 claims
- 1757US2014151936A1Pattern transferring apparatus and pattern transferring methodCANON KK·Filed 2013·Application pending·0 cites
- 1856US8393885B2Processing apparatusKASUMI KAZUYUKI·Filed 2008·Granted Mar 12, 2013·0 cites·6 claims
- 1940US2005248659A1Exposure apparatus, and method, device manufacturing method, pattern generator and maintenance methodKASUMI KAZUYUKI·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →