Inventor · disambiguated record
Hidekazu Takekoshi
Also filed as: TAKEKOSHI HIDEKAZU
9 granted patents·2 pending applications·40 citations·filing 1998–2020
82Inventor score
Top patents by PatentIndex Score
11 records- 0178US10896801B2Multiple electron beam image acquisition apparatus, and alignment method of multiple electron beam optical systemNUFLARE TECHNOLOGY INC·Filed 2019·Granted Jan 19, 2021·2 cites·10 claims
- 0276US8030626B2Apparatus and method for charged-particle beam writingNUFLARE TECHNOLOGY INC·Filed 2010·Granted Oct 4, 2011·4 cites·7 claims
- 0374US6011262AObject observing apparatus and method for adjusting the sameNIKON CORP·Filed 1998·Granted Jan 4, 2000·27 cites·9 claims
- 0462US8421040B2Writing apparatus and writing methodTAKEKOSHI HIDEKAZU·Filed 2009·Granted Apr 16, 2013·3 cites·6 claims
- 0551US11342157B2Charged particle beam inspection apparatus and charged particle beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2020·Granted May 24, 2022·0 cites·20 claims
- 0651US6812472B2Non-magnetic robotic manipulators for moving objects relative to a charged-particle-beam optical systemNIKON CORP·Filed 2003·Granted Nov 2, 2004·4 cites·31 claims
- 0749US2009032738A1Charged particle beam writing apparatus and method thereofNUFLARE TECHNOLOGY INC·Filed 2008·Application pending·0 cites
- 0848US10665422B2Electron beam image acquisition apparatus, and electron beam image acquisition methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted May 26, 2020·0 cites·10 claims
- 0943US2008299490A1Writing method and charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2008·Application pending·0 cites
- 1038US10345724B2Position correction method of stage mechanism and charged particle beam lithography apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Jul 9, 2019·0 cites·21 claims
- 1137US10373798B2Multi charged particle beam inspection apparatus, and multi charged particle beam inspection methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Aug 6, 2019·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →