Inventor · disambiguated record
Hideaki Tsugane
Also filed as: TSUGANE HIDEAKI
10 granted patents·2 pending applications·257 citations·filing 1996–2017
90Inventor score
Top patents by PatentIndex Score
12 records- 0191US6372554B1Semiconductor integrated circuit device and method for production of the sameHITACHI LTD·Filed 1999·Granted Apr 16, 2002·135 cites·21 claims
- 0286US5904556AMethod for making semiconductor integrated circuit device having interconnection structure using tungsten filmHITACHI LTD·Filed 1996·Granted May 18, 1999·63 cites·15 claims
- 0377US6780757B2Semiconductor integrated circuit device and method for making the sameRENESAS TECH CORP·Filed 2003·Granted Aug 24, 2004·17 cites·6 claims
- 0473US7566662B2Method of dry cleaning silicon surface prior to forming self-aligned nickel silicide layerRENESAS TECH CORP·Filed 2007·Granted Jul 28, 2009·4 cites·22 claims
- 0573US6583049B2Semiconductor integrated circuit device and method for making the sameHITACHI LTD·Filed 2001·Granted Jun 24, 2003·13 cites·7 claims
- 0670US6764945B2Method of manufacturing a multilayer metallization structure with non-directional sputtering methodRENESAS TECH CORP·Filed 2001·Granted Jul 20, 2004·13 cites·21 claims
- 0757US7088001B2Semiconductor integrated circuit device with a metallization structureHITACHI ULSI SYS CO LTD·Filed 2004·Granted Aug 8, 2006·5 cites·16 claims
- 0846US9748081B2Method of manufacturing semiconductor device and sputtering apparatusRENESAS ELECTRONICS CORP·Filed 2015·Granted Aug 29, 2017·0 cites·16 claims
- 0946US2017345629A1Method of manufacturing semiconductor device and sputtering apparatusRENESAS ELECTRONICS CORP·Filed 2017·Application pending·0 cites
- 1043US6300237B1Semiconductor integrated circuit device and method for making the sameHITACHI LTD·Filed 1999·Granted Oct 9, 2001·7 cites·23 claims
- 1142US2004235289A1Semiconductor integrated circuit device and method for making the sameFiled 2004·Application pending·0 cites
- 1240US6538329B2Semiconductor integrated circuit device and method for making the sameHITACHI LTD·Filed 2001·Granted Mar 25, 2003·0 cites·6 claims
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