Inventor · disambiguated record
Hisashi Tsukazaki
Also filed as: TSUKAZAKI HISASHI
5 granted patents·236 citations·filing 1987–1997
84Inventor score
Top patents by PatentIndex Score
5 records- 0192US4812326AEvaporation source with a shaped nozzleMITSUBISHI ELECTRIC CORP·Filed 1987·Granted Mar 14, 1989·101 cites·10 claims
- 0274US5837094ASemiconductor manufacturing apparatusMITSUBISHI ELECTRIC CORP·Filed 1997·Granted Nov 17, 1998·62 cites·7 claims
- 0364US5525158AThin film deposition apparatusMITSUBISHI ELECTRIC CORP·Filed 1993·Granted Jun 11, 1996·36 cites·13 claims
- 0455US5099791ACluster beam thin film deposition apparatus with thermionic electron controlMITSUBISHI ELECTRIC CORP·Filed 1990·Granted Mar 31, 1992·20 cites·25 claims
- 0547US5211994AApparatus for and method of forming thin filmMITSUBISHI DENKI KABUBSHIKI KA·Filed 1992·Granted May 18, 1993·17 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →