Inventor · disambiguated record
Hiroshige Uchida
Also filed as: UCHIDA HIROSHIGE
4 granted patents·3 pending applications·13 citations·filing 1994–2019
68Inventor score
Top patents by PatentIndex Score
7 records- 0169US8083960B2Etching endpoint determination methodUCHIDA HIROSHIGE·Filed 2008·Granted Dec 27, 2011·4 cites·3 claims
- 0259US8114244B2Method for etching a sampleHIROTA KOUSA·Filed 2009·Granted Feb 14, 2012·2 cites·8 claims
- 0347US10872774B2Plasma processing apparatus and plasma processing methodHITACHI HIGH TECH CORP·Filed 2019·Granted Dec 22, 2020·0 cites·6 claims
- 0445US2010178415A1Method for seasoning plasma processing apparatus, and method for determining end point of seasoningHITACHI HIGH TECH CORP·Filed 2009·Application pending·0 cites
- 0542US2012085494A1Plasma Etching ApparatusUCHIDA HIROSHIGE·Filed 2011·Application pending·0 cites
- 0638US2008216956A1Plasma processing apparatusNAKAMOTO SHIGERU·Filed 2007·Application pending·0 cites
- 0732US5803972ASemiconductor fabrication apparatusTOSHIBA KK·Filed 1994·Granted Sep 8, 1998·7 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →