Inventor · disambiguated record
Hirohisa Usuami
Also filed as: USUAMI HIROHISA
2 granted patents·1 pending application·147 citations·filing 1990–2004
69Inventor score
Top patents by PatentIndex Score
3 records- 0193US4985109AApparatus for plasma processingHITACHI LTD·Filed 1990·Granted Jan 15, 1991·99 cites·49 claims
- 0281US5661061AProcess for fabricating a semiconductor integrated circuit device having the multi-layered fin structureHITACHI LTD·Filed 1995·Granted Aug 26, 1997·48 cites·13 claims
- 0334US2005095776A1Semiconductor manufacturing apparatus, semiconductor manufacturing method and wafer stageTRECENTI TECHNOLOGIES INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →