Inventor · disambiguated record
Hisashi Yanagida
Also filed as: YANAGIDA HISASHI
1 granted patent·2 pending applications·6 citations·filing 2003–2009
27Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0143US6977804B2Electrostatic chuck support mechanism, support stand device and plasma processing equipmentMITSUBISHI HEAVY IND LTD·Filed 2003·Granted Dec 20, 2005·6 cites·6 claims
- 0239US2011297321A1Substrate support stage of plasma processing apparatusMATSUDA RYUICHI·Filed 2009·Application pending·0 cites
- 0334US2012002345A1Substrate support table of plasma processing deviceKAFUKU HIDETAKA·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →