Inventor · disambiguated record
Hong-Sik Byun
Also filed as: BYUN HONG-SIK
6 granted patents·5 pending applications·387 citations·filing 2001–2002
83Inventor score
Top patents by PatentIndex Score
11 records- 0192US6683274B1Wafer susceptorJUNSUNG ENGINEERING CO LTD·Filed 2002·Granted Jan 27, 2004·341 cites·8 claims
- 0271US6847516B2Electrostatic chuck for preventing an arcJUSUNG ENG CO LTD·Filed 2002·Granted Jan 25, 2005·16 cites·13 claims
- 0369US6770836B2Impedance matching circuit for inductively coupled plasma sourceJUSUNG ENG CO LTD·Filed 2002·Granted Aug 3, 2004·25 cites·16 claims
- 0444US6653988B2Parallel resonance whirl antennaJUSUNG ENG CO LTD·Filed 2002·Granted Nov 25, 2003·5 cites·8 claims
- 0537US6768269B2Plasma process chamber monitoring method and system used thereforJUSUNG ENG CO LTD·Filed 2002·Granted Jul 27, 2004·0 cites·6 claims
- 0637US2002007794A1Plasma processing apparatusFiled 2001·Application pending·0 cites
- 0734US2002189763A1Plasma processing apparatus having parallel resonance antenna for very high frequencyJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
- 0834US2002162742A1Cluster tool with vacuum wafer transfer moduleFiled 2002·Application pending·0 cites
- 0933US6685800B2Apparatus for generating inductively coupled plasmaJUSUNG ENG CO LTD·Filed 2001·Granted Feb 3, 2004·0 cites·11 claims
- 1033US2003095072A1Antenna electrode for inductively coupled plasma generation apparatusFiled 2002·Application pending·0 cites
- 1130US2003052087A1Plasma generating apparatus and SiO2 thin film etching method using the sameJUSUNG ENGINEERING CO·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →