Inventor · disambiguated record
Holger Halberla
Also filed as: HABERLA HOLGER
1 granted patent·1 citations·filing 2005–2005
16Inventor score
Technology areasG01R
Files withX FAB SEMICONDUCTOR FOUNDRIES1
Top patents by PatentIndex Score
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →