Inventor · disambiguated record
Hoonseop Kim
Also filed as: KIM HOONSEOP
3 granted patents·2 pending applications·2 citations·filing 2020–2024
49Inventor score
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0180US11287323B2Semiconductor substrate measuring apparatus, semiconductor substrate processing apparatus and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 29, 2022·2 cites·20 claims
- 0264US2025218718A1Contamination prevention device for extreme ultra-violet (euv) reticle and euv exposure apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0362US12087550B2Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·19 claims
- 0462US2025232948A1Ion beam reflector, substrate processing apparatus including the same, and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0543US11940620B2Method of cleaning collector of EUV light source systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →