Inventor · disambiguated record
Hongtaek Lim
Also filed as: LIM HONGTAEK
4 granted patents·4 pending applications·4 citations·filing 2015–2025
60Inventor score
Files withSAMSUNG ELECTRONICS CO LTD8
Top patents by PatentIndex Score
8 records- 0189US11476151B2Vacuum chuck, substrate processing apparatus including the same and related method of manufactureSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Oct 18, 2022·4 cites·20 claims
- 0266US2025379048A1Method of depositing atomic layer and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0365US12463018B2Edge ring, substrate processing apparatus having the same and method of manufacturing semiconductor device using the apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 4, 2025·0 cites·13 claims
- 0461US12424439B2Method of depositing atomic layer and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Sep 23, 2025·0 cites·20 claims
- 0561US2025146130A1Substrate processing apparatus and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0653US2024093368A1Edge ring, substrate processing apparatus including the same, and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0749US10468234B2Gas mixer and semiconductor device fabricating apparatuses including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 5, 2019·0 cites·18 claims
- 0837US2016194756A1Semiconductor processing apparatus having gas spray unitSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →