Inventor · disambiguated record
Hsiu-Kai Chang
Also filed as: CHANG HSIU-KAI
2 granted patents·1 pending application·2 citations·filing 2023–2024
36Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0181US12128452B2Multifunctional single wafer soaking-spinning-cleaning device and wafer processing methodGRAND PROCESS TECH CORPORATION·Filed 2023·Granted Oct 29, 2024·2 cites·15 claims
- 0262US2025058363A1Wafer processing methodGRAND PROCESS TECH CORPORATION·Filed 2024·Application pending·0 cites
- 0340US12387970B2Single wafer spin cleaning apparatus with soaking, cleaning, and etching functionsGRAND PROCESS TECH CORP·Filed 2023·Granted Aug 12, 2025·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →