Inventor · disambiguated record
Hsin Chang
Also filed as: CHANG HSIN
2 granted patents·0 citations·filing 2006–2007
23Inventor score
Technology areasG03F
Files withTAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
2 records- 0147US7728952B2Method and system for closing plate take-over in immersion lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Jun 1, 2010·0 cites·9 claims
- 0246US7800731B2Method and apparatus for removing particles in immersion lithographyTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Sep 21, 2010·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →