Inventor · disambiguated record
Hsuan Chang
Also filed as: CHANG HSUAN · CHANG HSUAN-TANG
1 granted patent·1 pending application·0 citations·filing 2008–2018
10Inventor score
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2 records- 0144US10804124B2Wafer processing tool capable of detecting wafer warpage and method for detecting wafer warpageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 13, 2020·0 cites·20 claims
- 0227US2009101886A1Semiconductor light-emitting device and method of fabricating the sameHUGA OPTOTECH INC·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →