Inventor · disambiguated record

Hsu-Shui Liu

Also filed as: LIU HSU-SHUI

77 granted patents·21 pending applications·381 citations·filing 2009–2025

98Inventor score

Technology areasH10P G03F H01J G05B B05B

Files withTAIWAN SEMICONDUCTOR MFG CO LTD91 TAIWAN SEMICONDUCTOR MFG3 LIU HSU-SHUI2 CHUEH CHIA-LIANG1 KAO MAO-LIN1

Top patents by PatentIndex Score

98 records

0198US10622236B2Apparatus and method for handling wafer carrier doorsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 14, 2020·283 cites·20 claims
0297US11402761B2Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 2, 2022·4 cites·20 claims
0395US12125725B2Integrated semiconductor die vessel processing workstationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 22, 2024·1 cites·20 claims
0495US10170287B1Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 1, 2019·15 cites·20 claims
0593US11961770B2Automated inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 16, 2024·3 cites·20 claims
0693US11721572B2Integrated semiconductor die vessel processing workstationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 8, 2023·1 cites·20 claims
0790US11784073B2Apparatus and method for handling wafer carrier doorsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 10, 2023·1 cites·20 claims
0890US11270900B2Apparatus and method for handling wafer carrier doorsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 8, 2022·2 cites·20 claims
0990US10490463B2Automated inspection toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 26, 2019·7 cites·20 claims
1089US8676537B2Portable wireless sensorLIU HSU-SHUI·Filed 2009·Granted Mar 18, 2014·15 cites·20 claims
1188US12283506B2Humidity control device for equipment front end module of semiconductor processing or characterization toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 22, 2025·1 cites·20 claims
1288US8712571B2Method and apparatus for wireless transmission of diagnostic informationLIU HSU-SHUI·Filed 2009·Granted Apr 29, 2014·16 cites·15 claims
1387US12321100B2Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jun 3, 2025·0 cites·20 claims
1487US2025346380A1Integrated semiconductor die parceling platformsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
1587US2025291257A1Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
1685US11430108B2Defect offset correctionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 30, 2022·1 cites·20 claims
1784US12334373B2Apparatus and method for inspecting wafer carriersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jun 17, 2025·0 cites·20 claims
1884US11670524B2Fully automated wafer debonding system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 6, 2023·2 cites·20 claims
1984US11488848B2Integrated semiconductor die vessel processing workstationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 1, 2022·2 cites·20 claims
2084US2024379393A1Integrated semiconductor die vessel processing workstationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
2183US10714364B2Apparatus and method for inspecting wafer carriersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 14, 2020·2 cites·20 claims
2282US12434870B2Integrated semiconductor die parceling platformsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 7, 2025·0 cites·20 claims
2382US12142507B2Systems and methods for air flow optimization in environment for semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 12, 2024·0 cites·20 claims
2482US10852704B2Semiconductor equipment management method, electronic device, and non-transitory computer readable storage mediumTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 1, 2020·2 cites·20 claims
2581US12282318B2Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 22, 2025·0 cites·20 claims
2681US2025062153A1System and method for ring frame cleaning and inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
2780US11921430B2Semiconductor lithography system and/or methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
2880US9852936B2Load port and method for loading and unloading cassetteTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 26, 2017·3 cites·20 claims
2980US2025284213A1System of removing particles from pellicleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
3080US2025349574A1Semiconductor System with an Integrated Wafer Humidity Control DeviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
3179US12165901B2System and method for ring frame cleaning and inspectionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
3279US2024387221A1Systems and methods for air flow optimization in environment for semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
3379US2024377826A1Systems and methods for raised floor automated sensor vehiclesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
3479US2025112081A1Vacuum wafer chuck for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
3578US12412760B2EFEM robot auto teaching methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 9, 2025·0 cites·20 claims
3678US11842481B2Defect offset correctionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 12, 2023·0 cites·20 claims
3777US12346034B2Method and system of removing particles from pellicleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 1, 2025·0 cites·20 claims
3877US2025216841A1Semiconductor wafer coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
3976US12153433B2Systems and methods for raised floor automated sensor vehiclesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 26, 2024·0 cites·20 claims
4076US11851224B2Integrated semiconductor die parceling platformsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·9 claims
4176US9786530B2Wafer transfer method and systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Oct 10, 2017·3 cites·19 claims
4276US2025299985A1Efem robot auto teaching methodologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
4375US2024363318A1Arcing protection method, processing tool and fabrication systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
4474US12191185B2Vacuum wafer chuck for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
4574US12057301B2Arcing protection method, processing tool and fabrication systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 6, 2024·0 cites·20 claims
4674US11786947B2Semiconductor arrangement and method for makingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 17, 2023·0 cites·20 claims
4774US11735455B2Systems, devices, and methods for air flow optimization including adjacent a FOUPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 22, 2023·0 cites·20 claims
4874US11699619B2Automated transfer and drying tool for process chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 11, 2023·0 cites·20 claims
4974US10510573B2Loading apparatus and operating method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 17, 2019·1 cites·20 claims
5074US2024203771A1Processing arrangement and method for adjusting gas flowTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites

Showing the top 50 of 98 patent records by PatentIndex Score.

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →