Inventor · disambiguated record

Hsing Chign Ma

Also filed as: MA HSING CHIGN

1 granted patent·5 citations·filing 2005–2005

26Inventor score

Technology areasG03F

Files withASAHI GLASS CO LTD1

Top patents by PatentIndex Score

1 record

0174US7504185B2Method for depositing multi-layer film of mask blank for EUV lithography and method for producing mask blank for EUV lithographyASAHI GLASS CO LTD·Filed 2005·Granted Mar 17, 2009·5 cites·10 claims

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