Inventor · disambiguated record
Huma Ashraf
Also filed as: ASHRAF HUMA
11 granted patents·7 pending applications·671 citations·filing 1997–2024
88Inventor score
Top patents by PatentIndex Score
18 records- 0193US6187685B1Method and apparatus for etching a substrateSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1999·Granted Feb 13, 2001·235 cites·19 claims
- 0292US6051503AMethod of surface treatment of semiconductor substratesSURFACE TECH SYS LTD·Filed 1997·Granted Apr 18, 2000·326 cites·31 claims
- 0385US6261962B1Method of surface treatment of semiconductor substratesSURFACE TECHNOLOGY SYSTEMS LTD·Filed 1997·Granted Jul 17, 2001·108 cites·23 claims
- 0464US9601341B2Method of etchingSPTS TECHNOLOGIES LTD·Filed 2014·Granted Mar 21, 2017·1 cites·19 claims
- 0562US2025308913A1Method of etchingSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 0662US2025308912A1Method and apparatus for plasma etching a substrateSPTS TECHNOLOGIES LTD·Filed 2024·Application pending·0 cites
- 0760US11056379B2Clamp assemblySPTS TECHNOLOGIES LTD·Filed 2015·Granted Jul 6, 2021·1 cites·20 claims
- 0851US2023170188A1Method of Plasma EtchingSPTS TECHNOLOGIES LTD·Filed 2022·Application pending·0 cites
- 0951US2023197457A1Plasma EtchingSPTS TECHNOLOGIES LTD·Filed 2022·Application pending·0 cites
- 1048US2024006181A1Control of Trench Profile Angle in SiC SemiconductorsSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 1146US11664232B2Method and apparatus for plasma etchingSPTS TECHNOLOGIES LTD·Filed 2020·Granted May 30, 2023·0 cites·11 claims
- 1245US11489106B2Method of plasma etchingSPTS TECHNOLOGIES LTD·Filed 2020·Granted Nov 1, 2022·0 cites·16 claims
- 1345US11037793B2Method of plasma etchingSPTS TECHNOLOGIES LTD·Filed 2019·Granted Jun 15, 2021·0 cites·21 claims
- 1443US9040427B2Method of plasma etchingSPTS TECHNOLOGIES LTD·Filed 2013·Granted May 26, 2015·0 cites·17 claims
- 1538US2021175082A1Method, Substrate and ApparatusSPTS TECHNOLOGIES LTD·Filed 2020·Application pending·0 cites
- 1636US2002185226A1Plasma processing apparatusFiled 2002·Application pending·0 cites
- 1735US10899606B2MicroneedlesSPTS TECHNOLOGIES LTD·Filed 2018·Granted Jan 26, 2021·0 cites·23 claims
- 1834US10431436B2Method and system of monitoring and controlling deformation of a wafer substrateSPTS TECHNOLOGIES LTD·Filed 2017·Granted Oct 1, 2019·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →