Inventor · disambiguated record
Hui-Chi Huang
Also filed as: HUANG HUI · HUANG HUI-CHI
41 granted patents·25 pending applications·50 citations·filing 2002–2025
96Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD54TAIWAN SEMICONDUCTOR MFG3HUANG HUI2CHAN HSUN-CHENG1CHANG CHIN-CHI1
Top patents by PatentIndex Score
66 records- 0192US9859165B1Planarization process for forming semiconductor device structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 2, 2018·8 cites·20 claims
- 0290US11145751B2Semiconductor structure with doped contact plug and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 12, 2021·6 cites·20 claims
- 0390US8367429B2Adaptive endpoint method for pad life effect on chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG·Filed 2011·Granted Feb 5, 2013·14 cites·16 claims
- 0488US9620628B1Methods of forming contact featureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 11, 2017·5 cites·20 claims
- 0586US11964358B2Chemical mechanical polishing apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 23, 2024·1 cites·20 claims
- 0684US12249542B2Semiconductor device structure with an interconnect structure in a dielectric layer with multiple hydrophobic layers along sidewalls of the dielectric layer, and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 11, 2025·0 cites·20 claims
- 0782US10957609B2Detecting the cleanness of wafer after post-CMP cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·2 cites·20 claims
- 0882US2025308928A1Chemical mechanical polishing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0981US12030159B2Chemical mechanical planarization toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 9, 2024·0 cites·20 claims
- 1081US11850704B2Methods to clean chemical mechanical polishing systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
- 1180US12087590B2Self-healing polishing padTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·20 claims
- 1280US9305851B2Systems and methods for chemical mechanical planarization with fluorescence detectionTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Apr 5, 2016·5 cites·14 claims
- 1380US2025316505A1Bevel edge removal methods, tools, and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1479US2024371648A1Self-healing polishing padTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1579US2024395562A1Chemical mechanical polish slurry and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1678US12300508B2Chemical mechanical polishing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 13, 2025·0 cites·20 claims
- 1778US11854872B2Semiconductor device structure with interconnect structure and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
- 1878US2025357100A1Processing tool and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1977US2025313723A1Composition and method for polishing and integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2077US2024217054A1Chemical mechanical polishing apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2176US8969922B2Field effect transistors and method of forming the sameLIU CHIA-CHU·Filed 2012·Granted Mar 3, 2015·5 cites·17 claims
- 2276US2024367202A1Electrical cleaning tool for wafer polishing tool systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2375US12362201B2Bevel edge removal methods, tools, and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 2475US12036636B2Mega-sonic vibration assisted chemical mechanical planarizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 16, 2024·0 cites·20 claims
- 2575US11590627B2Mega-sonic vibration assisted chemical mechanical planarizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Feb 28, 2023·1 cites·20 claims
- 2674US11446785B2Methods to clean chemical mechanical polishing systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 20, 2022·0 cites·20 claims
- 2773US10947414B2Compositions for use in chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 16, 2021·1 cites·20 claims
- 2872US12327734B2Chemical mechanical polish slurry and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 10, 2025·0 cites·20 claims
- 2971US12128455B2Electrical cleaning tool for wafer polishing tool systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 29, 2024·0 cites·20 claims
- 3071US11373879B2Chemical mechanical polishing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 28, 2022·0 cites·20 claims
- 3170US2025312891A1Chemical mechanical polishing system with conditioning ringTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3270US2025353140A1Polishing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 3368US11854827B2Magnetic slurry for highly efficiency CMPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 3468US11712778B2Chemical mechanical planarization toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 1, 2023·0 cites·20 claims
- 3568US2023364734A1Novel CMP Pad Design and Method of Using the SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3666US12359090B2Composition and method for polishing and integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 15, 2025·0 cites·20 claims
- 3766USD1049647SCrevice brushHUANG HUI·Filed 2024·Granted Nov 5, 2024·2 cites·1 claims
- 3864US11551936B2Self-healing polishing padTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 10, 2023·0 cites·20 claims
- 3964US10953514B1Chemical mechanical polishing apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 23, 2021·0 cites·20 claims
- 4063US11664213B2Bevel edge removal methods, tools, and systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 30, 2023·0 cites·20 claims
- 4163US2025303329A1Filter with metal-organic framework for cmp processingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4262US11417566B2Semiconductor device structure with interconnect structure and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 16, 2022·0 cites·20 claims
- 4361US11043396B2Chemical mechanical polish slurry and method of manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 22, 2021·0 cites·20 claims
- 4461US10777423B2Chemical mechanical polishing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 15, 2020·0 cites·20 claims
- 4561US2025316489A1Semiconductor device fabrication methods and devices for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4659US11056352B2Magnetic slurry for highly efficient CMPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 6, 2021·0 cites·20 claims
- 4759US2025372435A1System and method for cleaning a wafer surfaceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4858US2025349562A1Apparatus and methods for chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4956US12297375B2Slurry composition and method for polishing and integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 13, 2025·0 cites·20 claims
- 5055US9966281B2Methods and systems for chemical mechanical polish cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 8, 2018·0 cites·20 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Hui-Chi Huang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →