Inventor · disambiguated record

Huei-Chia Su

Also filed as: Su Huei-Chia

2 granted patents·2 citations·filing 2015–2015

34Inventor score

Technology areasH10P

Files withLINCO TECH CO LTD2

Top patents by PatentIndex Score

2 records

0160US9771649B2Substrate carrier unit for a film deposition apparatusLINCO TECH CO LTD·Filed 2015·Granted Sep 26, 2017·2 cites·10 claims
0220US9611542B2Film deposition system having a substrate carrier and a cooling deviceLINCO TECH CO LTD·Filed 2015·Granted Apr 4, 2017·0 cites·7 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →