Inventor · disambiguated record
Hyunwoong Hwang
Also filed as: HWANG HYUNWOONG
1 granted patent·2 pending applications·0 citations·filing 2022–2024
1Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD3
Top patents by PatentIndex Score
3 records- 0155US2024379386A1Substrate cleaning apparatus, substrate processing system including the same and method of processing substate using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0254US2024377760A1Photolithography apparatus and operation method of the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0346US11923209B2Substrate processing apparatus and substrate processing methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →