Inventor · disambiguated record
Hyun Woo Tak
Also filed as: TAK HYUN WOO
2 granted patents·5 pending applications·0 citations·filing 2018–2024
23Inventor score
Files withRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV5DAEJEON UNIV INDUSTRY UNIV COOPERATION FOUNDATION1SEMES CO LTD1
Top patents by PatentIndex Score
7 records- 0156US2025099999A1Treatment liquid supply apparatus, substrate processing apparatus including the same and method for processing treatment liquidSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0254US2024194448A1Atomic layer deposition device using multiple pulses to fill gap of semiconductor structure with high aspect ratio and atomic layer deposition method using the sameRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2023·Application pending·0 cites
- 0354US2024234146A9Method of manufacturing electronic device using cyclic doping process, and electronic device manufactured by the sameRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2023·Application pending·0 cites
- 0452US2025014868A1Etching plasma processing apparatus including consumable metal memberRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2023·Application pending·0 cites
- 0550US11127570B2Plasma source and plasma generation apparatus using the sameRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2018·Granted Sep 21, 2021·0 cites·10 claims
- 0647US2023395386A1Etching processing apparatus and etching processing methodDAEJEON UNIV INDUSTRY UNIV COOPERATION FOUNDATION·Filed 2023·Application pending·0 cites
- 0739US10784082B2Apparatus for generating plasma and apparatus for treating substrate having the sameRESEARCH & BUSINESS FOUND SUNGKYUNKWAN UNIV·Filed 2019·Granted Sep 22, 2020·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →