Inventor · disambiguated record
Ilya Chizhov
Also filed as: CHIZHOV ILYA
2 granted patents·2 pending applications·20 citations·filing 2002–2003
57Inventor score
Files withTHERMA WAVE INC2
Top patents by PatentIndex Score
4 records- 0169US6747746B2System and method for finding the center of rotation of an R-theta stageTHERMA WAVE INC·Filed 2002·Granted Jun 8, 2004·18 cites·21 claims
- 0245US7030984B2Fast wafer positioning method for optical metrologyTHERMA WAVE INC·Filed 2003·Granted Apr 18, 2006·2 cites·10 claims
- 0332US2003093164A1System for providing communication between a GUI and metrology control softwareFiled 2002·Application pending·0 cites
- 0430US2003081216A1Graphical user interface for sample positioningFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →