Inventor · disambiguated record
Il Gu Yun
Also filed as: YUN IL GU
2 granted patents·1 pending application·0 citations·filing 2018–2019
22Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0139US10770273B2OES device, plasma processing apparatus including the same and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Sep 8, 2020·0 cites·18 claims
- 0227US11862442B2Plasma process monitoring device and plasma processing apparatus including the sameUNIV YONSEI IACF·Filed 2019·Granted Jan 2, 2024·0 cites·8 claims
- 0327US2020013596A1Plasma process monitoring apparatus and plasma processing apparatus comprising the sameUNIV YONSEI IACF·Filed 2019·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Il Gu Yun files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →