Inventor · disambiguated record
Ilgu Yun
Also filed as: YUN Ilgu
3 granted patents·2 citations·filing 2016–2016
50Inventor score
Top patents by PatentIndex Score
3 records- 0172US9721768B2Apparatus for optical emission spectroscopy and plasma treatment apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Aug 1, 2017·2 cites·19 claims
- 0242US10107681B2Tube-type lens, optical emission spectroscopy (OES) apparatus including the tube-type lens, plasma monitoring system including the OES apparatus, and method of manufacturing semiconductor device by using the plasma monitoring systemSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Oct 23, 2018·0 cites·19 claims
- 0332US10408680B2Apparatus for optical emission spectroscopyUNIV YONSEI IACF·Filed 2016·Granted Sep 10, 2019·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →