Inventor · disambiguated record
Inhwang Park
Also filed as: PARK INHWANG
2 granted patents·1 pending application·4 citations·filing 2020–2023
46Inventor score
Technology areasH10P
Files withSEMES CO LTD3
Top patents by PatentIndex Score
3 records- 0184US11794220B2Fluid supply unit and substrate treating apparatus having the sameSEMES CO LTD·Filed 2020·Granted Oct 24, 2023·2 cites·20 claims
- 0284US11721575B2Substrate support unit and substrate treating apparatus having the sameSEMES CO LTD·Filed 2020·Granted Aug 8, 2023·2 cites·9 claims
- 0344US2023317479A1Transfer chamber and wafer processing module comprising transfer chamberSEMES CO LTD·Filed 2023·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Inhwang Park files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →