Inventor · disambiguated record
Incheol Song
Also filed as: SONG INCHEOL
3 granted patents·0 citations·filing 2019–2021
39Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD3
Top patents by PatentIndex Score
3 records- 0152US11817298B2Focus ring, chuck assembly for securing a substrate and plasma treatment apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 14, 2023·0 cites·17 claims
- 0245US11996270B2Wafer processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 28, 2024·0 cites·16 claims
- 0340US11450545B2Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Sep 20, 2022·0 cites·14 claims
Join the waitlist — get patent alerts
Get an alert when Incheol Song files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →