Inventor · disambiguated record
Inbeom Yim
Also filed as: YIM INBEOM
1 granted patent·3 pending applications·0 citations·filing 2021–2024
11Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0160US2025244660A1Semiconductor device manufacturing methodSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0254US11977338B2Defocus measurement method, correction method, and method of manufacturing semiconductor device by using the correction methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 7, 2024·0 cites·20 claims
- 0348US2024134290A1Multi-wavelength selection method for overlay measurement, and overlay measurement method and semiconductor device manufacturing method using multi-wavelengthsSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0447US2024118627A1Method of correcting overlay, method of controlling semiconductor process, and semiconductor processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →