Inventor · disambiguated record
Izumi Tsukamoto
Also filed as: TSUKAMOTO IZUMI
8 granted patents·1 pending application·277 citations·filing 1982–2013
90Inventor score
Top patents by PatentIndex Score
9 records- 0194US6762826B2Substrate attracting and holding system for use in exposure apparatusCANON KK·Filed 2003·Granted Jul 13, 2004·80 cites·10 claims
- 0293US6809802B1Substrate attracting and holding system for use in exposure apparatusCANON KK·Filed 2000·Granted Oct 26, 2004·70 cites·44 claims
- 0385US6633390B2Focus measurement in projection exposure apparatusCANON KK·Filed 2001·Granted Oct 14, 2003·31 cites·48 claims
- 0481US7755740B2Exposure apparatusCANON KK·Filed 2008·Granted Jul 13, 2010·6 cites·7 claims
- 0578US6654096B1Exposure apparatus, and device manufacturing methodCANON KK·Filed 2000·Granted Nov 25, 2003·17 cites·14 claims
- 0672USD705276SCabin for work machineKUBOTA KK·Filed 2013·Granted May 20, 2014·18 cites·1 claims
- 0765US5760879AMethod of detecting coma of projection optical systemCANON KK·Filed 1995·Granted Jun 2, 1998·30 cites·13 claims
- 0862US4538914ATransfer apparatus for compensating for a transfer errorCANON KK·Filed 1982·Granted Sep 3, 1985·25 cites·11 claims
- 0935US2002011207A1Exposure apparatus, coating/developing system, device manufacturing system, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance methodFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →