Inventor · disambiguated record
Jason M. Benz
Also filed as: BENZ JASON M · BENZ JASON MICHAEL
2 granted patents·13 citations·filing 2000–2004
50Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0163US6716362B1Method for thin film laser reflectance correlation for substrate etch endpointIBM·Filed 2000·Granted Apr 6, 2004·13 cites·39 claims
- 0228US7563546B2Process for creating phase edge structures in a phase shift maskINTERNAT BUSINESS MACHIENS COR·Filed 2004·Granted Jul 21, 2009·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →