Inventor · disambiguated record
James Albert Gilhooly
Also filed as: GILHOOLY JAMES A · GILHOOLY JAMES ALBERT
18 granted patents·1 pending application·787 citations·filing 1996–2002
95Inventor score
Top patents by PatentIndex Score
19 records- 0198US6126848AIndirect endpoint detection by chemical reaction and chemiluminescenceIBM·Filed 1998·Granted Oct 3, 2000·485 cites·13 claims
- 0288US5704987AProcess for removing residue from a semiconductor wafer after chemical-mechanical polishingIBM·Filed 1996·Granted Jan 6, 1998·104 cites·9 claims
- 0378US6228280B1Endpoint detection by chemical reaction and reagentIBM·Filed 1998·Granted May 8, 2001·51 cites·9 claims
- 0471US6276987B1Chemical mechanical polishing endpoint process controlIBM·Filed 1998·Granted Aug 21, 2001·32 cites·35 claims
- 0566US6440263B1Indirect endpoint detection by chemical reaction and chemiluminescenceIBM·Filed 2000·Granted Aug 27, 2002·8 cites·5 claims
- 0663US6899784B1Apparatus for detecting CMP endpoint in acidic slurriesECOPHYSICS AG·Filed 2002·Granted May 31, 2005·13 cites·8 claims
- 0762US6878629B1Method for detecting CMP endpoint in acidic slurriesIBM·Filed 2002·Granted Apr 12, 2005·8 cites·13 claims
- 0852US6254453B1Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD systemIBM·Filed 1999·Granted Jul 3, 2001·17 cites·6 claims
- 0950US6419785B1Endpoint detection by chemical reactionIBM·Filed 2000·Granted Jul 16, 2002·2 cites·5 claims
- 1047US6261851B1Optimization of CMP process by detecting of oxide/nitride interface using IR systemIBM·Filed 1999·Granted Jul 17, 2001·12 cites·15 claims
- 1146US6066564AIndirect endpoint detection by chemical reactionIBM·Filed 1998·Granted May 23, 2000·12 cites·15 claims
- 1242US6021679AProbe for slurry gas samplingIBM·Filed 1998·Granted Feb 8, 2000·11 cites·12 claims
- 1341US6228769B1Endpoint detection by chemical reaction and photoionizationIBM·Filed 1998·Granted May 8, 2001·8 cites·8 claims
- 1438US6180422B1Endpoint detection by chemical reactionIBM·Filed 1998·Granted Jan 30, 2001·5 cites·14 claims
- 1536US6506341B2Chemiluminescence detection apparatusIBM·Filed 1998·Granted Jan 14, 2003·6 cites·7 claims
- 1636US6194230B1Endpoint detection by chemical reaction and light scatteringIBM·Filed 1998·Granted Feb 27, 2001·5 cites·19 claims
- 1733US6251784B1Real-time control of chemical-mechanical polishing processing by monitoring ionization currentIBM·Filed 1998·Granted Jun 26, 2001·3 cites·19 claims
- 1833US6176765B1Accumulator for slurry samplingIBM·Filed 1999·Granted Jan 23, 2001·5 cites·9 claims
- 1932US2003206114A1Interface device for sti/bpsg EPD and real time controlFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →