Inventor · disambiguated record
Jaehwang Jung
Also filed as: JUNG JAEHWANG
13 granted patents·2 pending applications·13 citations·filing 2020–2024
84Inventor score
Top patents by PatentIndex Score
15 records- 0194US12347096B2Semiconductor measurement apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jul 1, 2025·2 cites·12 claims
- 0291US12002698B2Metrology apparatus and method based on diffraction using oblique illumination and method of manufacturing semiconductor device using the metrology methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jun 4, 2024·4 cites·16 claims
- 0391US11726046B2Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methodsSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 15, 2023·4 cites·15 claims
- 0488US11972960B2Imaging ellipsometry (IE)-based inspection method and method of fabricating semiconductor device by using IE-based inspection methodSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Apr 30, 2024·3 cites·17 claims
- 0575US2025044222A1Image measurement device and method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0672US12228499B2Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement methodSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Feb 18, 2025·0 cites·19 claims
- 0766US11604136B2Pupil ellipsometry measurement apparatus and method and method of fabricating semiconductor device using the pupil ellipsometry measurement methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 14, 2023·0 cites·14 claims
- 0862US12313393B2Level sensor and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted May 27, 2025·0 cites·20 claims
- 0962US2025271254A1Semiconductor measurement device and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 1053US12222282B2Semiconductor measurement apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Feb 11, 2025·0 cites·20 claims
- 1153US11275034B2Inspection apparatus and method based on coherent diffraction imaging (CDI)SAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 15, 2022·0 cites·18 claims
- 1250US12124698B2Computer system for hybrid of epoch- and pointer-based memory reclamation, and method thereofKOREA ADVANCED INST SCI & TECH·Filed 2021·Granted Oct 22, 2024·0 cites·17 claims
- 1350US11624699B2Measurement system capable of adjusting AOI, AOI spread and azimuth of incident lightSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Apr 11, 2023·0 cites·17 claims
- 1448US11428947B2Super-resolution holographic microscopeSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Aug 30, 2022·0 cites·19 claims
- 1543US11264256B2Wafer inspection apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 1, 2022·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →