Inventor · disambiguated record
Jeng-Yann Tsay
Also filed as: TSAY JENG-YANN
7 granted patents·12 citations·filing 2002–2020
77Inventor score
Top patents by PatentIndex Score
7 records- 0173US10624196B1Laser source device and extreme ultraviolet lithography deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 14, 2020·1 cites·20 claims
- 0270US11226564B2EUV light source and apparatus for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 18, 2022·1 cites·20 claims
- 0360US11158989B2Laser source device, extreme ultraviolet lithography device and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 26, 2021·0 cites·20 claims
- 0456US8149562B2System for decharging a wafer or substrate after dechucking from an electrostatic chuckHSU YEN-HSIANG·Filed 2007·Granted Apr 3, 2012·2 cites·20 claims
- 0552US6708565B2Ultrasonic wafer blade vibration detectingTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 23, 2004·6 cites·20 claims
- 0640US7354555B2Gas flow control system with interlockTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 8, 2008·2 cites·20 claims
- 0739US9970105B2Method for sealing processing moduleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted May 15, 2018·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Jeng-Yann Tsay files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →