Inventor · disambiguated record
Jen-Chieh Tung
Also filed as: TUNG JEN-CHIEH
3 granted patents·1 pending application·32 citations·filing 1999–2004
70Inventor score
Technology areasB24B
Files withPROMOS TECHNOLOGIES INC3
Top patents by PatentIndex Score
4 records- 0170US6679765B2Slurry supply system disposed above the rotating platen of a chemical mechanical polishing apparatusPROMOS TECHNOLOGIES INC·Filed 2002·Granted Jan 20, 2004·18 cites·20 claims
- 0245US6817924B1Chemical mechanical polishing apparatus, profile control system and conditioning method thereofPROMOS TECHNOLOGIES INC·Filed 2004·Granted Nov 16, 2004·6 cites·29 claims
- 0338US6053802AStabilization of slurry used in chemical mechanical polishing of semiconductor wafers by megasonic pulsePROMOS TECHNOLOGIES INC·Filed 1999·Granted Apr 25, 2000·8 cites·4 claims
- 0433US2002182986A1Polishing pad with wear indicator for profile monitoring and controlling and method and apparatus for polishing using said padFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →