Inventor · disambiguated record
Jen-Yuan Yang
Also filed as: YANG JEN-YUAN
2 granted patents·2 pending applications·23 citations·filing 2001–2003
60Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
4 records- 0169US6599759B2Method for detecting end point in plasma etching by impedance changeTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jul 29, 2003·11 cites·16 claims
- 0261US6918192B2Substrate drying systemTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 19, 2005·12 cites·12 claims
- 0330US2003217813A1Plasma processing apparatus comprising radio frequency power circuit providing enhanced plasma controlTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
- 0430US2005061775A1Novel design to eliminate wafer stickingFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →