Inventor · disambiguated record
Jianfang He
Also filed as: HE JIANFANG
2 granted patents·3 pending applications·0 citations·filing 2021–2023
23Inventor score
Files withINST OF MICROELECTRONICS CAS5
Top patents by PatentIndex Score
5 records- 0158US12222641B2Method and device for optimizing mask parametersINST OF MICROELECTRONICS CAS·Filed 2021·Granted Feb 11, 2025·0 cites·8 claims
- 0255US2025383607A1Method and apparatus for training on imaging of plasma lithographyINST OF MICROELECTRONICS CAS·Filed 2023·Application pending·0 cites
- 0352US12198930B2Method for manufacturing semiconductor deviceINST OF MICROELECTRONICS CAS·Filed 2021·Granted Jan 14, 2025·0 cites·10 claims
- 0450US2025355145A1Method for optimizing mask absorption material based on surface plasmon multilayer structure, and plasmonic superlensINST OF MICROELECTRONICS CAS·Filed 2023·Application pending·0 cites
- 0545US2024077799A1Method for correcting lithography pattern of surface plasmaINST OF MICROELECTRONICS CAS·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →