Inventor · disambiguated record
Jin Udagawa
Also filed as: UDAGAWA JIN
2 granted patents·3 pending applications·0 citations·filing 2001–2003
22Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0133US2004126673A1Microlithography reticles including high-contrast reticle-identification codes, and apparatus and methods for identifying reticles based on such codesNIKON CORP·Filed 2003·Application pending·0 cites
- 0230US6750464B2Alignment-mark patterns defined on a stencil reticle and detectable, after lithographic transfer to a substrate, using an optical-based detectorNIKON CORP·Filed 2001·Granted Jun 15, 2004·0 cites·30 claims
- 0330US2003010936A1Optically detectable alignment marks producing an enhanced signal-amplitude change from scanning of a detection light over the alignment mark, and associated alighment-detection methodsNIKON CORP·Filed 2002·Application pending·0 cites
- 0430US2003111618A1Methods and devices for detecting a distribution of charged-particle density of a charged-particle beam in charged-particle-beam microlithography systemsNIKON CORP·Filed 2002·Application pending·0 cites
- 0521US6737659B2Devices and methods for monitoring respective operating temperatures of components in a microlithography apparatusNIKON CORP·Filed 2001·Granted May 18, 2004·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →