Inventor · disambiguated record
John F. Baggett
Also filed as: BAGGETT JOHN · BAGGETT JOHN F
14 granted patents·6 pending applications·31 citations·filing 2015–2025
87Inventor score
Files withAXCELIS TECH INC20
Top patents by PatentIndex Score
20 records- 0191US10074508B2Low conductance self-shielding insulator for ion implantation systemsAXCELIS TECH INC·Filed 2016·Granted Sep 11, 2018·6 cites·20 claims
- 0290US10128084B1Wafer temperature control with consideration to beam power inputAXCELIS TECH INC·Filed 2017·Granted Nov 13, 2018·11 cites·18 claims
- 0384US10903097B2In-situ wafer temperature measurement and controlAXCELIS TECH INC·Filed 2019·Granted Jan 26, 2021·6 cites·25 claims
- 0480US10041789B2Integrated emissivity sensor alignment characterizationAXCELIS TECH INC·Filed 2016·Granted Aug 7, 2018·3 cites·20 claims
- 0577US11728187B2Method for decreasing cool down time with heated system for semiconductor manufacturing equipmentAXCELIS TECH INC·Filed 2018·Granted Aug 15, 2023·2 cites·16 claims
- 0675US10679818B2Low conductance self-shielding insulator for ion implantation systemsAXCELIS TECH INC·Filed 2018·Granted Jun 9, 2020·1 cites·20 claims
- 0775US10227693B1Outgassing impact on process chamber reduction via chamber pump and purgeAXCELIS TECH INC·Filed 2018·Granted Mar 12, 2019·2 cites·19 claims
- 0862US2025183085A1Large range heated electrostatic chuckAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0962US2021366746A1Active workpiece heating or cooling for an ion implantation systemAXCELIS TECH INC·Filed 2021·Application pending·0 cites
- 1062US2025210378A1System and method for dynamic loadlock pressure controlAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 1153US2025279297A1Variable vent pressure and flow for flushing loadlock chamberAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 1250US2018197761A1Active workpiece heating or cooling for an ion implantation systemAXCELIS TECH INC·Filed 2018·Application pending·0 cites
- 1347US11114330B2Substrate support having customizable and replaceable features for enhanced backside contamination performanceAXCELIS TECH INC·Filed 2019·Granted Sep 7, 2021·0 cites·27 claims
- 1446US11011397B2Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipmentAXCELIS TECH INC·Filed 2018·Granted May 18, 2021·0 cites·20 claims
- 1544US11901198B2Toxic outgas control post processAXCELIS TECH INC·Filed 2019·Granted Feb 13, 2024·0 cites·14 claims
- 1643US10714317B1Reduction of condensed gases on chamber walls via heated chamber housing for semiconductor processing equipmentAXCELIS TECH INC·Filed 2019·Granted Jul 14, 2020·0 cites·20 claims
- 1741US2020216951A1Reduction of condensed gases on chamber walls via purge gas dilution and evacuation for semiconductor processing equipmentAXCELIS TECH INC·Filed 2019·Application pending·0 cites
- 1836US10794694B2Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipmentAXCELIS TECH INC·Filed 2018·Granted Oct 6, 2020·0 cites·20 claims
- 1935US10861731B2Radiant heating presoakAXCELIS TECH INC·Filed 2018·Granted Dec 8, 2020·0 cites·7 claims
- 2030US9502207B1Cam actuated filament clampAXCELIS TECH INC·Filed 2015·Granted Nov 22, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →