Inventor · disambiguated record
Jong-Kill Lim
Also filed as: LIM JONG-KILL
6 granted patents·2 pending applications·6 citations·filing 2001–2020
71Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0170US7115840B2Wafer bake apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Oct 3, 2006·3 cites·9 claims
- 0261US7377776B2Semiconductor wafer baking apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted May 27, 2008·1 cites·4 claims
- 0347US11581187B2Method of heating SOC film on wafer by electromagnetic wave generator and heating apparatus using the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Feb 14, 2023·0 cites·17 claims
- 0444US10854484B1Method and system for managing liquid supplyXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2020·Granted Dec 1, 2020·0 cites·13 claims
- 0543US11779871B2Exhaust module for wafer baking apparatus and wafer processing system having the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Granted Oct 10, 2023·0 cites·17 claims
- 0643US6816230B2Exposure control apparatus in a lithography system and method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Nov 9, 2004·2 cites·11 claims
- 0739US2020218155A1Photoresist dispensing module and photoresist coating system having the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Application pending·0 cites
- 0838US2020194297A1Track system and method of processing semiconductor wafersXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →