Inventor · disambiguated record
Joyce S. Oey Hewett
Also filed as: OEY HEWETT JOYCE S
5 granted patents·2 pending applications·70 citations·filing 2001–2001
79Inventor score
Files withADVANCED MICRO DEVICES INC5
Top patents by PatentIndex Score
7 records- 0181US6615098B1Method and apparatus for controlling a tool using a baseline control scriptADVANCED MICRO DEVICES INC·Filed 2001·Granted Sep 2, 2003·30 cites·34 claims
- 0278US6785586B1Method and apparatus for adaptively scheduling tool maintenanceADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 31, 2004·23 cites·23 claims
- 0371US6675058B1Method and apparatus for controlling the flow of wafers through a process flowADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 6, 2004·14 cites·19 claims
- 0449US6967068B1Method of controlling stepper process parameters based upon optical properties of incoming anti-reflecting coating layers, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 22, 2005·2 cites·33 claims
- 0542US6764868B1Use of slurry waste composition to determine the amount of metal removed during chemical mechanical polishing, and system for accomplishing sameADVANCED MICRO DEVICES INC·Filed 2001·Granted Jul 20, 2004·1 cites·24 claims
- 0636US2002087229A1Use of endpoint system to match individual processing stations wirhin a toolFiled 2001·Application pending·0 cites
- 0735US2002177245A1Method and apparatus for controlling feature critical dimensions based on scatterometry derived profileFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →