Inventor · disambiguated record
Jonghun Pi
Also filed as: PI JONGHUN
3 granted patents·4 pending applications·0 citations·filing 2021–2024
38Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0158US2025218752A1Substrate processing apparatus, substate processing method using the same, and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0256US2025201541A1Arcing detection sensor and plasma treating apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0354US12431341B2Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 0449US12125687B2System of semiconductor process and control method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Oct 22, 2024·0 cites·19 claims
- 0546US2024047247A1Semiconductor process deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0644US2023096455A1Slurry supply device, substrate polishing apparatus, and substrate polishing methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0743US11940620B2Method of cleaning collector of EUV light source systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →