Inventor · disambiguated record
John Scanlan
Also filed as: SCANLAN JOHN · SCANLAN JOHN F
9 granted patents·1 pending application·410 citations·filing 1996–2005
91Inventor score
Top patents by PatentIndex Score
10 records- 0192US6656848B1Plasma chamber conditioningSCIENT SYSTEMS RES LTD·Filed 2002·Granted Dec 2, 2003·140 cites·2 claims
- 0289US7062411B2Method for process control of semiconductor manufacturing equipmentSCIENT SYSTEMS RES LTD·Filed 2004·Granted Jun 13, 2006·71 cites·10 claims
- 0385US5690504APlastic guide pin with steel coreTERADYNE INC·Filed 1996·Granted Nov 25, 1997·70 cites·19 claims
- 0484US6441620B1Method for fault identification in a plasma processFiled 2000·Granted Aug 27, 2002·35 cites·8 claims
- 0583US6677246B2Endpoint detection in the etching of dielectric layersSCIENT SYSTEMS RES LTD·Filed 2001·Granted Jan 13, 2004·41 cites·9 claims
- 0683US6644349B2In-tank water conditioner valveUSF CONSUMER & COMMERCIAL WATE·Filed 2001·Granted Nov 11, 2003·32 cites·16 claims
- 0777US6826489B2Fault classification in a plasma process chamberSCIENT SYSTEMS RES LTD·Filed 2002·Granted Nov 30, 2004·15 cites·7 claims
- 0858US6781383B2Method for fault detection in a plasma processSCIENT SYSTEMS RES LTD·Filed 2002·Granted Aug 24, 2004·4 cites·6 claims
- 0952US6855209B2Plasma chamber cleaningSCIENT SYSTEMS RES LTD·Filed 2002·Granted Feb 15, 2005·2 cites·8 claims
- 1040US2005212450A1Method and system for detecting electrical arcing in a plasma process powered by an AC sourceSCIENT SYSTEMS RES LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →