Inventor · disambiguated record
John P. Simons
Also filed as: SIMONS JOHN P · SIMONS JOHN PATRICK
39 granted patents·3 pending applications·760 citations·filing 1995–2007
98Inventor score
Top patents by PatentIndex Score
42 records- 0198US6558475B1Process for cleaning a workpiece using supercritical carbon dioxideIBM·Filed 2000·Granted May 6, 2003·126 cites·25 claims
- 0294US6346484B1Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structuresIBM·Filed 2000·Granted Feb 12, 2002·80 cites·12 claims
- 0393US6561220B2Apparatus and method for increasing throughput in fluid processingIBM·Filed 2001·Granted May 13, 2003·71 cites·9 claims
- 0491US6451375B1Process for depositing a film on a nanometer structureIBM·Filed 2001·Granted Sep 17, 2002·33 cites·11 claims
- 0590US6398875B1Process of drying semiconductor wafers using liquid or supercritical carbon dioxideIBM·Filed 2001·Granted Jun 4, 2002·53 cites·10 claims
- 0689US6425956B1Process for removing chemical mechanical polishing residual slurryIBM·Filed 2001·Granted Jul 30, 2002·44 cites·8 claims
- 0786US7709177B2Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereofIBM·Filed 2007·Granted May 4, 2010·7 cites·18 claims
- 0886US6673521B2Supercritical fluid(SCF) silylation processLNTERNAT BUSINESS MACHINES COR·Filed 2000·Granted Jan 6, 2004·27 cites·19 claims
- 0984US6656666B2Topcoat process to prevent image collapseIBM·Filed 2000·Granted Dec 2, 2003·27 cites·16 claims
- 1083US6622507B2Electromechanical device and a process of preparing sameIBM·Filed 2001·Granted Sep 23, 2003·27 cites·16 claims
- 1183US6509136B1Process of drying a cast polymeric film disposed on a workpieceIBM·Filed 2001·Granted Jan 21, 2003·21 cites·11 claims
- 1280US6838015B2Liquid or supercritical carbon dioxide compositionIBM·Filed 2001·Granted Jan 4, 2005·20 cites·8 claims
- 1380US6834671B2Check valve for micro electro mechanical structure devicesIBM·Filed 2003·Granted Dec 28, 2004·19 cites·6 claims
- 1480US6736906B2Turbine part mount for supercritical fluid processorIBM·Filed 2002·Granted May 18, 2004·16 cites·28 claims
- 1580US6454869B1Process of cleaning semiconductor processing, handling and manufacturing equipmentIBM·Filed 2001·Granted Sep 24, 2002·24 cites·9 claims
- 1677US6683008B1Process of removing ion-implanted photoresist from a workpieceIBM·Filed 2002·Granted Jan 27, 2004·19 cites·14 claims
- 1775US7288155B2Method for the rapid thermal control of a work piece in liquid or supercritical fluidIBM·Filed 2005·Granted Oct 30, 2007·3 cites·7 claims
- 1874US8828143B2Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluidSIMONS JOHN P·Filed 2007·Granted Sep 9, 2014·3 cites·12 claims
- 1974US6457480B1Process and apparatus for cleaning filtersIBM·Filed 2001·Granted Oct 1, 2002·9 cites·10 claims
- 2071US6875286B2Solid CO2 cleaningIBM·Filed 2002·Granted Apr 5, 2005·15 cites·10 claims
- 2170US6927393B2Method of in situ monitoring of supercritical fluid process conditionsIBM·Filed 2002·Granted Aug 9, 2005·8 cites·12 claims
- 2266US6892741B2Apparatus and process for supercritical carbon dioxide phase processingIBM·Filed 2004·Granted May 17, 2005·5 cites·4 claims
- 2365US6890855B2Process of removing residue material from a precision surfaceIBM·Filed 2001·Granted May 10, 2005·9 cites·20 claims
- 2464US8388758B2Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluidSIMONS JOHN P·Filed 2007·Granted Mar 5, 2013·1 cites·4 claims
- 2563US7081208B2Method to build a microfilterIBM·Filed 2002·Granted Jul 25, 2006·9 cites·3 claims
- 2663US6739346B2Apparatus for cleaning filtersIBM·Filed 2002·Granted May 25, 2004·4 cites·4 claims
- 2761US6579464B2Fixtures for processing a workpiece in a supercritical fluidIBM·Filed 2001·Granted Jun 17, 2003·4 cites·22 claims
- 2860US5593812APhotoresist having increased sensitivity and use thereofIBM·Filed 1995·Granted Jan 14, 1997·18 cites·18 claims
- 2959US6653233B2Process of providing a semiconductor device with electrical interconnection capabilityIBM·Filed 2001·Granted Nov 25, 2003·6 cites·8 claims
- 3058US7361444B1Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereofIBM·Filed 1999·Granted Apr 22, 2008·22 cites·6 claims
- 3158US6953042B2Apparatus and process for supercritical carbon dioxide phase processingIBM·Filed 2002·Granted Oct 11, 2005·2 cites·4 claims
- 3255US6821488B1Sample holding chuck for use in reactor and reactor using sameIBM·Filed 2000·Granted Nov 23, 2004·4 cites·25 claims
- 3354US7485964B2Dielectric materialIBM·Filed 2006·Granted Feb 3, 2009·0 cites·5 claims
- 3453US7736833B2Multilayered resist systems using tuned polymer films as underlayers and methods of fabrication thereofIBM·Filed 2007·Granted Jun 15, 2010·3 cites·17 claims
- 3550US5753412APhotoresist having increased sensitivity and use thereofIBM·Filed 1996·Granted May 19, 1998·11 cites·31 claims
- 3648US7056837B2Process of insulating a semiconductor device using a polymeric materialIBM·Filed 2003·Granted Jun 6, 2006·1 cites·8 claims
- 3747US5770345APhotoresist having increased sensitivity and use thereofIBM·Filed 1996·Granted Jun 23, 1998·9 cites·15 claims
- 3844US7332436B2Process of removing residue from a precision surface using liquid or supercritical carbon dioxide compositionIBM·Filed 2004·Granted Feb 19, 2008·0 cites·14 claims
- 3943US6997197B2Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluidIBM·Filed 2002·Granted Feb 14, 2006·0 cites·9 claims
- 4041US2003008129A1Dielectric material and process of insulating a semiconductor device using sameIBM·Filed 2001·Application pending·0 cites
- 4139US2003019528A1Check valve for micro electro mechanical structure devicesIBM·Filed 2001·Application pending·0 cites
- 4237US2003196679A1Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxideIBM·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →