Inventor · disambiguated record
Jongwoo Sun
Also filed as: SUN JONGWOO
20 granted patents·4 pending applications·14 citations·filing 2015–2024
89Inventor score
Top patents by PatentIndex Score
24 records- 0192US11264291B2Sensor device and etching apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Mar 1, 2022·9 cites·18 claims
- 0286US11348760B2Plasma processing apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted May 31, 2022·2 cites·17 claims
- 0378US11092495B2Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Aug 17, 2021·1 cites·20 claims
- 0472US2024371611A1Method and system for monitoring substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0571US10892145B2Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jan 12, 2021·1 cites·18 claims
- 0669US12211672B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·11 claims
- 0765US12068140B2Method and system for monitoring substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 20, 2024·0 cites·11 claims
- 0865US11215506B2Substrate processing apparatus, substrate processing module, and semiconductor device fabrication methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 4, 2022·0 cites·5 claims
- 0963US10643858B2Method of etching substrateSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted May 5, 2020·1 cites·19 claims
- 1059US11984304B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 14, 2024·0 cites·17 claims
- 1159US10935429B2Substrate processing apparatus, substrate processing module, and semiconductor device fabrication methodSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 2, 2021·0 cites·20 claims
- 1254US11715628B2Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 1, 2023·0 cites·17 claims
- 1351US11862440B2Semiconductor processing equipment including electrostatic chuck for plasma processingSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 2, 2024·0 cites·18 claims
- 1448US12087554B2Substrate treating apparatus and substrate treating system having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Sep 10, 2024·0 cites·20 claims
- 1548US11929239B2Plasma processing apparatus and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 12, 2024·0 cites·18 claims
- 1644US12315703B2Plasma processing apparatus and methods of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 27, 2025·0 cites·10 claims
- 1743US11251022B2Gas supply assembly and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Feb 15, 2022·0 cites·17 claims
- 1843US10861724B2Substrate inspection apparatus and substrate processing system including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Dec 8, 2020·0 cites·20 claims
- 1942US11430679B2Semiconductor manufacturing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Aug 30, 2022·0 cites·18 claims
- 2040US11450545B2Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Sep 20, 2022·0 cites·14 claims
- 2140US10431432B2Plasma treatment system including cover plate to insulate windowSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Oct 1, 2019·0 cites·19 claims
- 2237US2019096636A1Plasma processing apparatus, plasma processing method and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 2333US2017032988A1Plasma treatment apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
- 2425US2016141148A1Plasma process apparatus having view portSUN JONGWOO·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →