Inventor · disambiguated record
Junhua Ding
Also filed as: DING JUNHUA
45 granted patents·4 pending applications·471 citations·filing 2005–2024
98Inventor score
Top patents by PatentIndex Score
49 records- 0197US7891228B2Dual-mode mass flow verification and mass flow delivery system and methodMKS INSTR INC·Filed 2008·Granted Feb 22, 2011·56 cites·14 claims
- 0297US7474968B2Critical flow based mass flow verifierMKS INSTR INC·Filed 2006·Granted Jan 6, 2009·59 cites·14 claims
- 0396US10031005B2Method and apparatus for self verification of pressure-based mass flow controllersMKS INSTR INC·Filed 2012·Granted Jul 24, 2018·20 cites·14 claims
- 0496US8997686B2System for and method of fast pulse gas deliveryDING JUNHUA·Filed 2010·Granted Apr 7, 2015·17 cites·17 claims
- 0595US7461549B1Mass flow verifiers capable of providing different volumes, and related methodsMKS INSTR INC·Filed 2007·Granted Dec 9, 2008·37 cites·18 claims
- 0694US9348339B2Method and apparatus for multiple-channel pulse gas delivery systemDING JUNHUA·Filed 2011·Granted May 24, 2016·13 cites·21 claims
- 0793US10649471B2Method and apparatus for pulse gas delivery with isolation valvesMKS INSTR INC·Filed 2018·Granted May 12, 2020·7 cites·22 claims
- 0893US10031004B2Methods and apparatus for wide range mass flow verificationMKS INSTR INC·Filed 2016·Granted Jul 24, 2018·9 cites·28 claims
- 0992US10801867B2Method and apparatus for self verification of pressured based mass flow controllersMKS INSTR INC·Filed 2018·Granted Oct 13, 2020·4 cites·14 claims
- 1092US10725484B2Method and apparatus for pulse gas delivery using an external pressure triggerMKS INSTR INC·Filed 2018·Granted Jul 28, 2020·5 cites·27 claims
- 1192US9557744B2System for and method of monitoring flow through mass flow controllers in real timeDING JUNHUA·Filed 2014·Granted Jan 31, 2017·15 cites·19 claims
- 1292US8793082B2Upstream volume mass flow verification systems and methodsDING JUNHUA·Filed 2009·Granted Jul 29, 2014·24 cites·11 claims
- 1391US10606285B2System for and method of monitoring flow through mass flow controllers in real timeMKS INSTR INC·Filed 2017·Granted Mar 31, 2020·8 cites·9 claims
- 1491US10031531B2System for and method of multiple channel fast pulse gas deliveryDING JUNHUA·Filed 2014·Granted Jul 24, 2018·14 cites·45 claims
- 1590US7673645B2Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangementMKS INSTR INC·Filed 2007·Granted Mar 9, 2010·31 cites·14 claims
- 1689US12287655B2Method and apparatus for mass flow controlMKS INSTR INC·Filed 2023·Granted Apr 29, 2025·1 cites·34 claims
- 1789US7757554B2High accuracy mass flow verifier with multiple inletsMKS INSTR INC·Filed 2008·Granted Jul 20, 2010·20 cites·22 claims
- 1888US7467027B2Compensation for thermal siphoning in mass flow controllersMKS INSTR INC·Filed 2006·Granted Dec 16, 2008·29 cites·16 claims
- 1986US12000723B2Method and apparatus for pressure based mass flow controlMKS INSTR INC·Filed 2022·Granted Jun 4, 2024·1 cites·24 claims
- 2085US7706925B2Integrated pressure and flow ratio control systemMKS INSTR INC·Filed 2007·Granted Apr 27, 2010·23 cites·22 claims
- 2182US9471066B2System for and method of providing pressure insensitive self verifying mass flow controllerDING JUNHUA·Filed 2014·Granted Oct 18, 2016·6 cites·19 claims
- 2282US9127361B2Methods of and apparatus for controlling pressure in multiple zones of a process toolDING JUNHUA·Filed 2009·Granted Sep 8, 2015·4 cites·9 claims
- 2380US10698426B2Methods and apparatus for multiple channel mass flow and ratio control systemsMKS INSTR INC·Filed 2018·Granted Jun 30, 2020·4 cites·26 claims
- 2480US9952078B2Upstream volume mass flow verification systems and methodsMKS INSTR INC·Filed 2014·Granted Apr 24, 2018·4 cites·12 claims
- 2579US10353408B2System for and method of fast pulse gas deliveryDING JUNHUA·Filed 2012·Granted Jul 16, 2019·5 cites·19 claims
- 2678US11404290B2Method and apparatus for pulse gas deliveryMKS INSTR INC·Filed 2019·Granted Aug 2, 2022·2 cites·27 claims
- 2778US11187561B2Methods and apparatus for pressure based mass flow ratio controlMKS INSTR INC·Filed 2020·Granted Nov 30, 2021·1 cites·23 claims
- 2877US10126760B2System for and method of fast pulse gas deliveryMKS INSTR INC·Filed 2014·Granted Nov 13, 2018·4 cites·22 claims
- 2977US9846074B2System for and method of monitoring flow through mass flow controllers in real timeDING JUNHUA·Filed 2012·Granted Dec 19, 2017·5 cites·15 claims
- 3076US8079383B2Controller gain scheduling for mass flow controllersDING JUNHUA·Filed 2006·Granted Dec 20, 2011·10 cites·3 claims
- 3175US11513108B2Method and apparatus for pulse gas delivery with concentration measurementMKS INSTR INC·Filed 2020·Granted Nov 29, 2022·1 cites·14 claims
- 3275US10514712B2Method and apparatus for pressure-based flow measurement in non-critical flow conditionsMKS INSTR INC·Filed 2016·Granted Dec 24, 2019·3 cites·19 claims
- 3374US8849466B2Method of and apparatus for multiple channel flow ratio controller systemDING JUNHUA·Filed 2011·Granted Sep 30, 2014·6 cites·52 claims
- 3473US7621290B2Gas delivery method and system including a flow ratio controller using antisymmetric optimal controlMKS INSTR INC·Filed 2005·Granted Nov 24, 2009·10 cites·15 claims
- 3571US11513542B2Method and apparatus for pulse gas delivery using an external pressure triggerMKS INSTR INC·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 3671US7296465B2Vertical mount mass flow sensorMKS INSTR INC·Filed 2005·Granted Nov 20, 2007·9 cites·19 claims
- 3770US12393209B2Methods and apparatus for reporting inlet pressure in mass flow controllersMKS INSTR INC·Filed 2024·Granted Aug 19, 2025·0 cites·4 claims
- 3868US10969799B2System for and method of fast pulse gas deliveryMKS INSTR INC·Filed 2018·Granted Apr 6, 2021·1 cites·44 claims
- 3964US12264950B2Method and apparatus for mass flow verificationMKS INSTR INC·Filed 2022·Granted Apr 1, 2025·0 cites·24 claims
- 4062US12360093B2Method and apparatus for pulse gas delivery with concentration measurementMKS INSTR INC·Filed 2021·Granted Jul 15, 2025·0 cites·30 claims
- 4162US8386083B2Systems and methods for updating valve cracking current in mass flow controllersMKS INSTR INC·Filed 2008·Granted Feb 26, 2013·2 cites·15 claims
- 4258US2024281007A1Method and Apparatus for Integrated Pressure and Flow ControllerMKS INSTR INC·Filed 2023·Application pending·0 cites
- 4357US11573583B2Pressure control using an external triggerMKS INSTR INC·Filed 2021·Granted Feb 7, 2023·0 cites·24 claims
- 4455US12306160B2Binary gas purity analyzerMKS INSTR INC·Filed 2021·Granted May 20, 2025·0 cites·19 claims
- 4555US2025053182A1Method and Apparatus for Automatic Self Calibration of Mass Flow ControllerMKS INSTR INC·Filed 2023·Application pending·0 cites
- 4653US11940307B2Methods and apparatus for pressure based mass flow ratio controlMKS INSTR INC·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
- 4746US2014326909A1Pressure-balanced control valvesDING JUNHUA·Filed 2014·Application pending·0 cites
- 4839US8997791B2Multiple-channel flow ratio controllerL BASSI MICHAEL·Filed 2006·Granted Apr 7, 2015·1 cites·13 claims
- 4939US2008250854A1Mass flow device using a flow equalizer for improving the output responseDING JUNHUA·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →