Inventor · disambiguated record
Junko Hatta
Also filed as: HATTA JUNKO
3 granted patents·79 citations·filing 1992–1993
73Inventor score
Top patents by PatentIndex Score
3 records- 0178US5391886ACharged particle beam exposure system and method of exposing a pattern on an object by such a charged particle beam exposure systemFUJITSU LTD·Filed 1993·Granted Feb 21, 1995·36 cites·18 claims
- 0268US5255228ASemiconductor memory device with redundancy circuitsMATSUSHITA ELECTRONICS CORP·Filed 1992·Granted Oct 19, 1993·34 cites·10 claims
- 0348US5194741AMethod for writing a pattern on an object by a focused electron beam with an improved efficiencyFUJITSU LTD·Filed 1992·Granted Mar 16, 1993·9 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →