Inventor · disambiguated record
Juergen Kleinschmidt
Also filed as: KLEINSCHMIDT JUERGEN
55 granted patents·2 pending applications·663 citations·filing 2000–2019
98Inventor score
Files withLAMBDA PHYSIK AG25XTREME TECH GMBH20DEUTSCHES KREBSFORSCH2KLEINSCHMIDT JUERGEN2BOLSHUKHIN DENIS1
Top patents by PatentIndex Score
57 records- 0193US8975543B2Electrical terminal moduleHAKEMEYER FRANK·Filed 2009·Granted Mar 10, 2015·63 cites·18 claims
- 0292US6894298B2Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas dischargeXTREME TECH GMBH·Filed 2002·Granted May 17, 2005·75 cites·36 claims
- 0391US7365350B2Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasmaXTREME TECH GMBH·Filed 2006·Granted Apr 29, 2008·23 cites·49 claims
- 0491US6563853B2Gas performance control system for gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted May 13, 2003·46 cites·59 claims
- 0590US6421365B1Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2000·Granted Jul 16, 2002·27 cites·52 claims
- 0688US9464119B2Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3SONNTAG FLORIAN·Filed 2010·Granted Oct 11, 2016·33 cites·4 claims
- 0785US6894285B2Arrangement for monitoring the energy radiated by an EUV radiation sourceXTREME TECH GMBH·Filed 2003·Granted May 17, 2005·23 cites·13 claims
- 0883US6747741B1Multiple-pass interferometric deviceLAMBDA PHYSIK AG·Filed 2001·Granted Jun 8, 2004·27 cites·49 claims
- 0982US6700916B1E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systemsLAMBDA PHYSIK AG·Filed 2002·Granted Mar 2, 2004·23 cites·1 claims
- 1081US7266137B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2005·Granted Sep 4, 2007·5 cites·28 claims
- 1180US6856638B2Resonator arrangement for bandwidth controlLAMBDA PHYSIK AG·Filed 2001·Granted Feb 15, 2005·20 cites·47 claims
- 1279US7476884B2Device and method for generating extreme ultraviolet (EUV) radiationXTREME TECH GMBH·Filed 2006·Granted Jan 13, 2009·14 cites·32 claims
- 1379US6946669B2Arrangement for the generation of EUV radiation with high repetition ratesXTREME TECH GMBH·Filed 2004·Granted Sep 20, 2005·23 cites·16 claims
- 1477US6815900B2Radiation source with high average EUV radiation outputXTREME TECHNOLOGIES GBMH·Filed 2003·Granted Nov 9, 2004·29 cites·37 claims
- 1575US7541604B2Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housingsXTREME TECHONOLGIES GMBH·Filed 2006·Granted Jun 2, 2009·9 cites·39 claims
- 1675US6792023B1Method and apparatus for reduction of spectral fluctuationsLAMBDA PHYSIK AG·Filed 2002·Granted Sep 14, 2004·13 cites·35 claims
- 1771US6516012B2Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2002·Granted Feb 4, 2003·8 cites·15 claims
- 1870US7531820B2Arrangement and method for the generation of extreme ultraviolet radiationXTREME TECH GMBH·Filed 2006·Granted May 12, 2009·8 cites·26 claims
- 1970US6577665B2Molecular fluorine laserLAMBDA PHYSIK AG·Filed 2002·Granted Jun 10, 2003·8 cites·33 claims
- 2069US7414253B2EUV radiation source with high radiation output based on a gas dischargeXTREME TECH GMBH·Filed 2006·Granted Aug 19, 2008·11 cites·20 claims
- 2169US6603789B1Narrow band excimer or molecular fluorine laser with improved beam parametersLAMBDA PHYSIK AG·Filed 2001·Granted Aug 5, 2003·9 cites·55 claims
- 2268US6667804B1Temperature compensation method for wavemetersLAMBDA PHYSIK AG·Filed 2000·Granted Dec 23, 2003·12 cites·21 claims
- 2367USD626516SAdjusting device for the setpoint of an electric modulePHOENIX CONTACT GMBH & CO·Filed 2009·Granted Nov 2, 2010·16 cites·1 claims
- 2467US7079224B2Arrangement for debris reduction in a radiation source based on a plasmaXTREME TECH GMBH·Filed 2004·Granted Jul 18, 2006·9 cites·12 claims
- 2567US6717973B2Wavelength and bandwidth monitor for excimer or molecular fluorine laserLAMBDA PHYSIK AG·Filed 2001·Granted Apr 6, 2004·8 cites·84 claims
- 2667US6678291B2Molecular fluorine laserLAMBDA PHYSIK AG·Filed 2000·Granted Jan 13, 2004·7 cites·22 claims
- 2766US7488962B2Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasmaXTREME TECH GMBH·Filed 2006·Granted Feb 10, 2009·7 cites·35 claims
- 2866US6700915B2Narrow band excimer laser with a resonator containing an optical element for making wavefront correctionsLAMBDA PHYSIK AG·Filed 2001·Granted Mar 2, 2004·8 cites·23 claims
- 2965US7595594B2Arrangement for switching high electric currents by a gas dischargeXTREME TECH GMBH·Filed 2008·Granted Sep 29, 2009·4 cites·26 claims
- 3065US6829261B2Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operationXTREME TECH GMBH·Filed 2003·Granted Dec 7, 2004·10 cites·16 claims
- 3164US6553050B1Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2002·Granted Apr 22, 2003·7 cites·30 claims
- 3263US6965624B2Laser gas replenishment methodLAMBDA PHYSIK AG·Filed 2003·Granted Nov 15, 2005·7 cites·30 claims
- 3362US7075963B2Tunable laser with stabilized gratingLAMBDA PHYSIK AG·Filed 2001·Granted Jul 11, 2006·6 cites·39 claims
- 3462US6834066B2Stabilization technique for high repetition rate gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted Dec 21, 2004·6 cites·30 claims
- 3562US6801561B2Laser system and method for spectral narrowing through wavefront correctionLAMBDA PHYSIK AG·Filed 2001·Granted Oct 5, 2004·6 cites·30 claims
- 3661US11267847B2Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3DEUTSCHES KREBSFORSCH·Filed 2019·Granted Mar 8, 2022·0 cites·20 claims
- 3761US6476987B1Excimer laser with line narrowingLAMBDA PHYSIK AG·Filed 2000·Granted Nov 5, 2002·6 cites·46 claims
- 3860US6795473B1Narrow band excimer laser with a prism-grating as line-narrowing optical elementLAMBDA PHYSIK AG·Filed 2000·Granted Sep 21, 2004·7 cites·58 claims
- 3959US7800086B2Arrangement for radiation generation by means of a gas dischargeXTREME TECH GMBH·Filed 2006·Granted Sep 21, 2010·5 cites·24 claims
- 4059US6865212B2Method for energy control of pulsed driven, gas discharged-coupled beam sourcesXTREME TECH GMBH·Filed 2003·Granted Mar 8, 2005·5 cites·5 claims
- 4159US6570901B2Excimer or molecular fluorine laser having lengthened electrodesLAMBDA PHYSIK AG·Filed 2001·Granted May 27, 2003·5 cites·38 claims
- 4256US6914920B2Method for energy stabilization of gas discharged pumped in selected impulse following driven beam sourcesXTREME TECH GMBH·Filed 2003·Granted Jul 5, 2005·4 cites·10 claims
- 4355US8410422B2Method and arrangement for the adjustment of characteristics of a beam bundle of high-energy radiation emitted from a plasmaBOLSHUKHIN DENIS·Filed 2012·Granted Apr 2, 2013·1 cites·17 claims
- 4455US6721345B2Electrostatic precipitator corona discharge ignition voltage probe for gas status detection and control system for gas discharge lasersLAMBDA PHYSIK AG·Filed 2001·Granted Apr 13, 2004·9 cites·8 claims
- 4553US6567451B2Narrow band excimer or molecular fluorine laser having an output coupling interferometerLAMBDA PHYSIK AG·Filed 2002·Granted May 20, 2003·2 cites·34 claims
- 4652US10344057B2Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3DEUTSCHES KREBSFORSCH·Filed 2016·Granted Jul 9, 2019·0 cites·8 claims
- 4750US8546775B2Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasmaKLEINSCHMIDT JUERGEN·Filed 2011·Granted Oct 1, 2013·1 cites·16 claims
- 4849US7755070B2Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation sourceXTREME TECH GMBH·Filed 2006·Granted Jul 13, 2010·3 cites·27 claims
- 4949US6855932B2Detector arrangement for energy measurement of pulsed x-ray radiationXTREME TECH GMBH·Filed 2003·Granted Feb 15, 2005·3 cites·14 claims
- 5047US7006541B2Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lampLAMBDA PHYSIK AG·Filed 2003·Granted Feb 28, 2006·1 cites·8 claims
Showing the top 50 of 57 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →